For efficient product development in micro- and nanotechnology
Precise, reliable and fast measuring technology for characterizing and monitoring the quality of devices is decisive to in developing and producing microsystems. This is all the more important since microsensors are increasingly taking over safety-related tasks too – placing high demands on reliability and functional safety. A robust design and high production precision play a key role in this regard. Active microelectromechanical structural elements such as MEMS actuators or sensors need suitable optical measurement methods, since purely electrical characterization isn’t enough.
Polytec’s Micro System Analyzers are ideal for this. On the one hand, they enable determination of the surface topography with a high resolution and, on the other, they allow for precise characterization of the dynamic motion behaviour too. Dynamic measurement using laser Doppler vibrometry is characterized by a high frequency bandwidth and extremely good displacement amplitude resolution. This measuring technology even enables vibration measurements up to the high MHz range (and even the GHz range) – which is required for an ever-growing number of microtechnology applications.
Applications
- Wafer-level
![Deflection shape after modal testing microacoustic device on wafer level]( "Deflection shape after modal testing microacoustic device on wafer level")
Deflection shape after modal testing microacoustic device on wafer level - Prototype testing
![MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium]( "MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium")
MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium - cMUTs and pMUTs
![Laser Doppler vibrometer measurements of several leaking CMUT cells visualizing dynamic displacement]( "Laser Doppler vibrometer measurement of leaking CMUT transducer cells")
Laser Doppler vibrometer measurements of several leaking CMUT cells, visible with a much lower dynamic displacement when operating the device - SAWs and BAWs
![Dynamic measurement of a SAW surface acoustic wave filter]( "Dynamic measurement of a SAW surface acoustic wave filter")
Dynamic measurement of a SAW surface acoustic wave filter - Micro mechanics
![Laser vibration measurement for testing micro-mechanical MEMS]( "Laser vibration measurement for testing micro-mechanical MEMS")
Laser vibration measurement for testing micro-mechanical MEMS - MEMS reliability
![Vibration measurements for reliability testing on MEMS in a vacuum chamber]( "Vibration measurements for reliability testing on MEMS in a vacuum chamber")
Vibration measurements for reliability testing on MEMS in a vacuum chamber - Bio MEMS
![Deflection shape of cMUT transducer array, University of Alberta]( "Deflection shape of cMUT transducer array, University of Alberta")
Deflection shape of cMUT transducer array, University of Alberta - MEMS pressure sensor
![2D/3D profile of MEMS pressure sensor with 2.5x magnification and microscope measurement (courtesy: CIS)]( "2D/3D profile of MEMS pressure sensor with 2.5x magnification and microscope measurement (courtesy: CIS)")
2D/3D profile of MEMS pressure sensor with 2.5x magnification and microscope measurement. CiS Forschungsinstitut für Mikrosensorik GmbH - FE model validation
![FE model validation based on laser vibration measurement and test data]( "FE model validation based on laser vibration measurement and test data")
FE model validation based on laser vibration measurement and test data
Laser vibrometry focusing on the small details
Characterize small and delicate structures in a non-contact way. Analyze vibration, acoustics and dynamics. Measure biomedical samples, electronics components and microstructures like MEMS by light, without mass-loading, and from DC up to the GHz range on a large bandwidth. Laser vibrometers focus on the small details, measuring deflection shapes for model validation. They assess the frequency response and determine resonance frequency, impulse response and Q factor. No matter how big or small – Polytec vibrometers measure it!