Full-field vibration measurement on small parts & microstructures
The MSA-060 Micro System Analyzer is a compact optical measurement system for the comprehensive assessment of the vibrational behavior of MEMS and microsystems, dynamics of precision mechanics and reliability of electronics. This entry-level solution helps identify resonance frequencies, vibration amplitudes and even visualizes operational deflection shapes on entire samples.
The MSA-060 is designed for full-field and non-contact vibration analysis, capturing true vibration dynamics from very small and delicate to meso-scale test structures. The powerful data acquisition VibSoft-PRO offers reference channel plus signal generator. The optional xy-stage allows for scanning entire sample surfaces, providing real-time vibration data with picometer resolution on an extended bandwidth from DC to 24 MHz.
Highlights
- Compact vibration measurement system with laser precision
- Real-time response measurement up to 24 MHz
- Picometer out-of-plane displacement resolution
- Easy setup and documentation with integrated HD+ camera
- Powerful DAQ incl. reference channel and signal generator
- Scanning option with motorized xy-stage
- Software for comprehensive data analysis and animation of deflection shapes
Laser vibrometry focusing on the small details
Characterize small and delicate structures in a non-contact way. Analyze vibration, acoustics and dynamics. Measure biomedical samples, electronics components and microstructures like MEMS by light, without mass-loading, and from DC up to the GHz range on a large bandwidth. Laser vibrometers focus on the small details, measuring deflection shapes for model validation. They assess the frequency response and determine resonance frequency, impulse response and Q factor. No matter how big or small – Polytec vibrometers measure it!
Versatile, modular laser vibrometer with microscope optics
Benefit from professional data acquisition of up to 24 MHz, including reference channel, signal generator, even for stand-alone use. The modular and flexible system comes with a compact stand, yet works for optional and classic tripod mounting. The MSA-060 features different microscope objectives, working as an entry-level scanning system for both micro and meso-scaled samples. Keep full visual control with easy setup and test reporting with an integrated HD+ camera and its inline illumination unit, enabling best video quality and simplifying the definition of scan grids. Last but not least, benefit from the gold standard software in scanning laser Doppler vibrometry, using comprehensive data analysis and evaluation, a programmable signal processor, leading to intuitive visualization of measurement data and animated deflection shapes.
Accessories and components
Optical accessories
VIB-A-10xLENS 10x Microscope Lens
Providing a laser spot diameter of 3 μm at 37.3 mm stand-off distance.
VIB-A-20xLENS 20x Microscope Lens
Providing a laser spot diameter of 1.5 μm at 21.7 mm stand-off distance.
VIB-A-510 Illumination Module
LED light source providing a coaxial illumination of the test object. Highly recommended for use with the VIB-A-10xLENS / VIB-A-20xLENS Microscope Lenses.
Miscellaneous
A-JST-0001
Joystick for convenient manual control of the xy-positioning stage.
Related products
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics up to 25 MHz by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 8 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis from DC up to 25 MHz with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
PSV Software
The PSV Software is the heart of every Polytec full-field vibration measurement system. This comprehensive software package allows the fast and simple acquisition, display and editing of vibration measurement data gathered with all PSV Scanning Vibrometers, the MSA Micro System Analyzer series for microscopic observations or the automated structural test station RoboVib®.
VibSoft
VibSoft is a comprehensive and easy-to-use software package for vibration data acquisition and analysis. VibSoft closes the gap between raw signal acquisition and profound analysis of vibration measurement data, offering optimum performance with laser Doppler vibrometers.