微纳米技术及
用于表征和监测装置质量的精确、可靠且快速的测量技术在开发和生产微系统中起决定性作用。这一点尤其重要，因为微型传感器越来越多地用于安全相关的任务，即对可靠性和功能安全性提出很高要求的任务。强大的设计和高生产精度在这方面发挥关键作用。
相关产品
MSA-600显微式激光测振仪
MSA-600显微式激光测振仪专用于测量MEMS和显微结构，是获取三维静态特性与动态特性的一体化光学测量解决方案，其有助于加快产品开发进程，优化产品质量控制，甚至可集成至商用探针台上进行晶圆级测试。现在高达 8 GHz。
MSA-100-3D显微式激光测振仪
3D显微式激光测振仪同时记录XYZ三个方向的振动分量，测试带宽覆盖DC~25 MHz，每向的振幅分辨率均达到亚皮米级，可用于面内和面外振动测试。
更多应用
- Haptic displays
![Laser vibration measurement for testing and validating haptics displays]( "Laser vibration measurement for testing and validating haptics displays")
Laser vibration measurement for testing and validating haptics displays - 引线接合
![Optical measurement technology for Electronic, Semiconductor and Solar industry]()
Optical measurement technology for Electronic, Semiconductor and Solar industry - 太阳能技术
![Testing of solar panels, modules and solar technology]( "Testing of solar panels, modules and solar technology")
Testing of solar panels, modules and solar technology - 印刷电路板
![Operating deflection shape analysis of high voltage converter modules (by Siemens, measured by Polytec)]( "Operating deflection shape analysis of high voltage converter modules (by Siemens, measured by Polytec)")
Operating deflection shape analysis of high voltage converter modules (by Siemens, measured by Polytec)
