Surface profilers based on white-light interferometry (WLI)
Surface profilers from Polytec are innovative, high-precision and non-contact sensor systems for characterizing the entire surface topography of a workpiece or microstructures in 3D. The TopMap line of surface profilers is based on the principle of white-light interferometry, also known as coherent or vertical scanning interferometry or coherence radar. With their large vertical range, nanometer resolution and the ability of areal measurement for large samples or multi-sample measurements in a single shot, these optical profilers are perfect for measurement laboratories or production testing needs. Use TopMap surface profilers for non-contact fast and reliable measurement of surface parameters such as flatness, step height and parallelism of large sample structures.