Highlights
- Cost-efficient and demand-oriented use of the latest measuring equipment and laboratories w/o investment
- Video conferencing allows remote testing services
- Non-contact, traceable measurement of both tiny microsystems <1 µm and larger precision mechanics
- 3D topography reliably measures form parameters such as step height, parallelism, flatness and roughness with high precision
- Upon request even vibration-isolated test setups for inspecting microsystems and MEMS
- Measurement principle works even in electromagnetic fields, on all materials including biological samples
Typical applications
In the field of high resolution non-contact 3D topography measurements, see these typical applications:
- Verification of form deviations on micro and nanometer scale, e.g. for sealing surfaces with very detailed expectations regarding pressure and leakage, flatness, roughness and waviness
- inspection of large samples with large field of view up to 45 x 34 mm in a very short time even without stitching
- evaluation of surface finish providing a large number of ISO parameters for roughness and waviness
- characterization of friction surfaces regarding wear resistance using the material ratio curve
- evaluation of the surface finish quality e.g. measurement of roping for aluminum sheets
- detection of undesired warpage of functional surfaces like electronics boards or circuits
- measurement of step heights and parallelism of surfaces with large height difference up to 70 mm
- thanks to the telecentric optical design, surface inspection in hard to access areas and deeply recessed surfaces such as depressions and bores