Characterizing microsystems' and MEMS' topography and dynamics
Using the versatile surface measurement systems from Polytec, you can complete your micro and nano technology tasks reliably, quickly and with a high level of precision. You can eject channel depths on your lab-on-a-chip, determine the step height on MEMS packaging, establish how flat pressure sensors are and analyze MEMS using surface parameters. Even performing dynamic out-of-plane and in-plane measurements on RF filters to determine MHz resonance frequencies will be a simple task for you now – thanks to Polytec’s MSA Micro System Analyzer series.
Applications
- MEMS pressure sensor
![2D/3D profile of MEMS pressure sensor with 2.5x magnification and microscope measurement (courtesy: CIS)]( "2D/3D profile of MEMS pressure sensor with 2.5x magnification and microscope measurement (courtesy: CIS)")
2D/3D profile of MEMS pressure sensor with 2.5x magnification and microscope measurement. CiS Forschungsinstitut für Mikrosensorik GmbH - Vertical interconnect access (VIA)
![Microstructure inspection of VIA on an integrated circuit (IC)]()
- Flexible electronics
![Surface analysis and and quality control on flexible electronics and printed electronics]( "Surface analysis and and quality control on flexible electronics and printed electronics")
Surface analysis and and quality control on flexible electronics and printed electronics - Die bonding
![Elektrisch leitendes Kleben in der Elektronik]()
- Lab-on-a-chip
![Lab-on-a-chip (LoC) 3D topography and form analysis]( "Lab-on-a-chip (LoC) 3D topography and form analysis")
Lab-on-a-chip (LoC) 3D topography and form analysis - Surface roughness
![Surface roughness masurement and measuring Ra, Rz roughness parameters]( "Surface roughness masurement and measuring Ra, Rz roughness parameters")
Surface roughness masurement and measuring Ra, Rz roughness parameters - Surface flatness
![Surface flatness measurement and parallellism as form parameter]( "Surface flatness measurement and parallellism as form parameter")
Surface flatness measurement and parallellism as form parameter - Surface step-height
![Measure step height, form parameter and 3D surface topography]( "Measure step height, form parameter and 3D surface topography")
Measure step height, form parameter and 3D surface topography - Layer thickness
![Optical and areal step edge test showing a 75.2 nm thick coating]( "Optical and areal step edge test showing a 75.2 nm thick coating")
Optical and areal step edge test showing a 75.2 nm thick coating
