Optical characterization of MEMS for bio-medical applications

Deflection shape of cMUT transducer array, University of Alberta

实际示例：

微机械压电超声换能器 (pMUTs)不断突破实时 3D 医学成像（超声检查）的应用极限，如血管内超声 (IVUS) 和超声心动图等。

Polytec显微系统分析仪采用非接触式测量方法，在高频（~10MHz）高空间分辨率（<1μm）条件下，最高精度测量超声换能器的微机械结构的振动特性。

Vibrometer scan on BioMems revealing the amplitude of vibrations in a phononic cone, able to focus the energy at specific locations, Reboud J., et al, Glascow University

Vibrometer scan revealing the amplitude of vibrations in a phononic cone, able to focus the energy at specific locations, Reboud J., et al, Glascow University

Development of phononic surface acoustic wave devices

Phononic surface acoustic wave devices have shown great potential for enabling integrated point-of-care diagnostics, using the mechanical energy carried by sound to manipulate liquid samples from patients on low-cost microchips. Reserachers have demonstrated the detection of malaria [Reboud J. et al., PNAS, 2012, 15162-7] from the volume of a fingerprick of blood using an acoustic filter. Laser vibrometry is an essential tool of the development process that permits the visualization of true vibrations on the surface across the entire microchips, thus validating our designs. In the future, more complex assays will be integrated on the platform to detect diseases such as tuberculosis.